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US 8,427,808 B2Granted
Variable capacity element
AssigneeKabushiki Kaisha Toshiba
InventorMitsuyoshi Endo
Life of this patent
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Abstract
A variable capacity element has a substrate, a pair of capacitor electrodes, a pair of driver electrodes, and a pair of capacitor wirings why one of the capacitor electrodes is movable by applying a voltage between the driver electrodes. A pair of driver electrodes are connected to the pair of capacitor electrodes, being insulated from the capacitor electrodes. A pair of capacitor wiring extend in parallel each other from connecting portions with the pairs of the capacitor electrodes, being electrically connected with the capacitor electrodes.
Claims16
A variable capacity element comprising:
- a substrate;
- a pair of capacitor electrodes, each being planar in a rectangular shape substantially, one of capacitor electrodes being movable;
- a pair of driver electrodes connected to the pair of capacitor electrodes, the driver electrodes being insulated with capacitor electrodes;
- and
- multiple pairs of capacitor wirings extending in parallel each other from connecting portions with the pairs of the capacitor electrodes, each capacitor wiring being electrically connected with each capacitor electrode.
2 more elements
A variable capacity element comprising:
- a substrate;
- a pair of capacitor electrodes, each being planar in a rectangular shape substantially, one of capacitor electrodes being movable;
- a pair of driver electrodes which is connected to a pair of capacitor electrodes, the driver electrodes being insulated with capacitor electrodes;
- and
- multiple pairs of capacitor wirings extending in parallel each other from connecting portion with the pairs of the capacitor electrodes, each capacitor wiring being electrically connected with each capacitor electrode.
2 more elements
Dependencies are inferred from the claim text.