Back to results
US 8,427,646 B2Granted
Dual emission microscope
AssigneeFEI Company
InventorRainer Uhl
Life of this patent
Estimating the term…
Abstract
A microscope device having dual emission capability, wherein detrimental effects of image-aberrations and -distortions are reduced. By providing the means for reflecting the one beam in a manner so as to invert its handedness and the means for reflecting the second beam in a manner so as to preserve its handedness, a fully symmetrical configuration is obtained, where corresponding image points in both color/polarisation channels all experience the same field-dependent aberrations.
Claims20
A microscope device comprising:
- a dichroic element for splitting collimated light from an intermediate image into two beams, a first beam containing a higher percentage of light of a first spectral range than light of a second spectral range and a second beam containing a lower percentage of light of the first spectral range than light of the second spectral range,
- reflectors for reflecting the first beam and the second beam;
- a detector for detecting at least one image;
- and
- a first lens for forming onto the detector a first image of the sample formed from light from the first beam and a second image of the sample formed the intermediate image from the second beam, the first image and the second image being displaced from each other and of opposite handedness.
2 more elements
A method of operating a dual emission microscope, comprising:
- forming an intermediate image of a sample;
- splitting light from the intermediate image into a first collimated beam containing a higher percentage of light of a first spectral range than light of a second spectral range and a second beam containing a lower percentage of light of the first spectral range than light of the second spectral range;
- forming a first image of the sample from the first collimated beam and forming a second image of the sample from the second collimated beam, the first image shifted with respect to the second image and the images being of opposite handedness.
Dependencies are inferred from the claim text.