Inline inspection of photovoltaics for electrical defects
AssigneeKLA-Tencor Corporation
InventorsGeorge H. Zapalac, Jr., Kirk J. Bertsche, David L. Brown, J. Kirkwood H. Rough, David A. Soltz, Yehiel Gotkis
Life of this patent
Estimating the term…
Loading patent…
AssigneeKLA-Tencor Corporation
InventorsGeorge H. Zapalac, Jr., Kirk J. Bertsche, David L. Brown, J. Kirkwood H. Rough, David A. Soltz, Yehiel Gotkis
Estimating the term…
A method of inline inspection of photovoltaic material for electrical anomalies. A first electrical connection is formed to a first surface of the photovoltaic material, and a second electrical connection is formed to an opposing second surface of the photovoltaic material. A localized current is induced in the photovoltaic material and properties of the localized current in the photovoltaic material are sensed using the first and second electrical connections. The properties of the sensed localized current are analyzed to detect the electrical anomalies in the photovoltaic material.
A method of inline inspection of moving photovoltaic material for anomalies without either stopping the movement or removing samples of the photovoltaic material, the method comprising the steps of:
Dependencies are inferred from the claim text.