Apparatus and method for microfabricated multi-dimensional sensors and sensing systems
AssigneeKWJ Engineering, Inc.
InventorJoseph R. Stetter
Life of this patent
Estimating the term…
Loading patent…
AssigneeKWJ Engineering, Inc.
InventorJoseph R. Stetter
Estimating the term…
A universal microelectromechanical (MEMS) nano-sensor platform having a substrate and conductive layer deposited in a pattern on the surface to make several devices at the same time, a patterned insulation layer, wherein the insulation layer is configured to expose one or more portions of the conductive layer, and one or more functionalization layers deposited on the exposed portions of the conductive layer to make multiple sensing capability on a single MEMS fabricated device. The functionalization layers are adapted to provide one or more transducer sensor classes selected from the group consisting of: radiant, electrochemical, electronic, mechanical, magnetic, and thermal sensors for chemical and physical variables and producing more than one type of sensor for one or more significant parameters that need to be monitored.
A monitoring device, comprising:
A wearable sensor platforms for awareness, wherein the sensor provides medical alerts through vital signs, other medical sensors, or environmental sensors, wherein the sensor platform comprise less than 500 uWatts power, and wherein the sensor platform comprises at least one MEMS sensor configured to detect one or more chemical changes to an environment.
Dependencies are inferred from the claim text.