MOSFET and method for manufacturing the same
AssigneeInstitute of Microelectronics, Chinese Academy of Sciences
InventorsHuilong Zhu, Qingqing Liang, Haizhou Yin, Zhijiong Luo
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AssigneeInstitute of Microelectronics, Chinese Academy of Sciences
InventorsHuilong Zhu, Qingqing Liang, Haizhou Yin, Zhijiong Luo
Estimating the term…
The present application provides a MOSFET and a method for manufacturing the same. The MOSFET comprises: a semiconductor substrate; a first buried insulating layer on the semiconductor substrate; a back gate formed in a first semiconductor layer which is on the first buried insulating layer; a second buried insulating layer on the first semiconductor layer; source/drain regions formed in a second semiconductor layer which is on the second buried insulating layer; a gate on the second semiconductor layer; and electrical contacts on the source/drain regions, the gate and the back gate, wherein the back gate is only under a channel region and one of the source/drain regions and not under the other of the source/drain regions, and a common electrical contact is formed between the back gate and the one of the source/drain regions. The MOSFET improves an effect of suppressing short channel effects by an asymmetric back gate, and reduces a footprint on a wafer by using the common conductive via.
A method for manufacturing a MOSFET, comprising:
A MOSFET, comprising:
Dependencies are inferred from the claim text.