Integrated circuitry
AssigneeMicron Technology, Inc.
InventorsDavid H. Wells, Eric R. Blomiley
Life of this patent
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Abstract
Some embodiments include formation of at least one cavity in a first semiconductor material, followed by epitaxially growing a second semiconductor material over the first semiconductor material and bridging across the at least one cavity. The cavity may be left open, or material may be provided within the cavity. The material provided within the cavity may be suitable for forming, for example, one or more of electromagnetic radiation interaction components, transistor gates, insulative structures, and coolant structures. Some embodiments include one or more of transistor devices, electromagnetic radiation interaction components, transistor devices, coolant structures, insulative structures and gas reservoirs.
Claims10
Integrated circuitry, comprising:
- a monocrystalline silicon base having at least one conduit therein;
- one or more integrated circuit devices over the base;
- and
- liquid and/or gel within the at least one conduit.
Integrated circuitry, comprising:
- a monocrystalline silicon base having an opening contained therein;
- a transistor gate over the base;
- a pair of source/drain regions proximate the transistor gate and spaced from one another by a channel region which is within the base and directly beneath the transistor gate;
- the channel region and source/drain regions being three regions of a transistor;
- and
- wherein the opening is directly beneath one or more of the three regions of the transistor.
Integrated circuitry, comprising:
- a monocrystalline silicon base having an opening contained therein;
- dielectric material lining the opening;
- electrically conductive metal-containing material within the lined opening;
- and
- a pair of conductively-doped source/drain regions within the base and spaced from one another by a channel region;
- the conductive material gatedly connecting the source/drain regions to one another through the channel region.
Dependencies are inferred from the claim text.