Thin film capacitor, and display device and memory cell employing the same, and manufacturing methods of them

A thin film capacitor comprising:

• laminated structures each of which is constituted by stacking one of lower electrodes, a first insulating layer, and one of upper electrodes, the laminated structures being provided along a second direction and on both sides of each of signal lines extending along a first direction, the second direction intersecting with the first direction,
• the upper electrodes being electrically connected to each other via a corresponding connecting wire provided above the upper electrodes without making contact with edge portions of the laminated structures and the signal lines, the edge portions being opposed to each other along the second direction,
• first wires being provided above corresponding ones of the upper electrodes with a second insulating film therebetween, the second insulating film having first contact holes,
• the first wires being electrically connected to the respective corresponding ones of the upper electrodes through respective corresponding ones of the first contact holes, and
• at least the first wires being used as the connecting wire.

A method for manufacturing a thin film capacitor including a plurality of regions each surrounded by a plurality of scanning signal lines and a plurality of data signal lines which perpendicularly intersect with each other on a substrate, the plurality of regions each including:

• one of lower electrodes, a first insulating film, and one of upper electrodes which are provided in this order, the method comprising:
• electrically connecting adjacent ones of the upper electrodes to each other via a corresponding connecting wire which is positioned above the adjacent ones of the upper electrodes and intersects with one of the data signal lines,
• providing first wires above corresponding ones of the upper electrodes with a second insulating film therebetween, the second insulating film having first contact holes;
• electrically connecting each of the first wires to the corresponding one of the upper electrodes through corresponding one of the first contact holes;
• and
• using at least the first wires as the connecting wire.