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US 8,424,192 B1Granted
Method for manufacturing a pole for a magnetic recording head
AssigneeWestern Digital (Fremont), LLC
InventorsDanning Yang, Lei Wang, Yingjian Chen, Brant Nease, Kyusik Sin
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Abstract
A method and system for manufacturing a pole on a recording head is disclosed. The method and system include sputtering at least one ferromagnetic layer and fabricating a hard mask on the ferromagnetic layer. The method and system also include defining the pole and depositing a write gap on the pole. A portion of the pole is encapsulated in an insulator.
Claims14
A method for manufacturing a pole for a magnetic recording head comprising:
- sputtering at least one ferromagnetic layer;
- fabricating a hard mask on the at least one ferromagnetic layer, the hard mask including at least one hard mask layer and at least one auxiliary mask layer on the at least one hard mask layer;
- defining the pole using a removal process for removing a portion of the at least one ferromagnetic layer, the at least one ferromagnetic layer having a first removal rate for the removal process, the at least one hard mask layer having a second removal rate for the removal process, and the at least one auxiliary mask layer having a third removal rate for the removal process, the first removal rate and the third removal rate being greater than the second removal rate;
- depositing a write gap on the pole;
- and
- encapsulating a portion of the pole in an insulator.
3 more elements
Dependencies are inferred from the claim text.