Tri-axis accelerometer having a single proof mass and fully differential output signals
AssigneeRobert Bosch GmbH
InventorsZhiyu Pan, Christoph Lang, Gary Yama, Matthias Metz, Markus Ulm
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Abstract
A tri-axis accelerometer includes a proof mass, at least four anchor points arranged in at least two opposite pairs, a first pair of anchor points being arranged opposite one another along a first axis, a second pair of anchor points being arranged opposite one another along a second axis, the first axis and the second axis being perpendicular to one another, and at least four spring units to connect the proof mass to the at least four anchor points, the spring units each including a pair of identical springs, each spring including a sensing unit.
Claims14
A method of fabricating a tri-axis accelerometer, comprising:
- providing a substrate layer;
- providing an intermediate layer on a first side of the substrate layer;
- providing a top layer on the intermediate layer;
- providing a sensing material on the top layer;
- patterning the top layer to form at least two pairs of sensing structure elements underneath the sensing material, and a first proof mass arranged between the at least two pairs of sensing structure elements, the at least two pairs of sensing structure elements being arranged along at least two axial directions that are perpendicular to one another;
- removing a portion of the intermediate layer underneath the sensing structure elements;
- and
- removing a portion of the intermediate layer underneath at least a part of the first proof mass.
Dependencies are inferred from the claim text.