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US 8,418,554 B2Granted
Gyroscope packaging assembly
AssigneeThe Boeing Company
InventorRichard J. Joyce
Life of this patent
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Abstract
Packaging techniques for planar resonator gyroscopes, such as disc resonator gyroscopes (DRGs) are disclosed. In one embodiment, a packaged resonator gyroscope comprises a carrier, a substrate layer mounted to the carrier, a baseplate coupled to the substrate to define a cavity between the substrate and the baseplate, and a resonator mounted to the baseplate and suspended in the cavity. Other embodiments may be described.
Claims19
A packaged resonator gyroscope, comprising:
- a carrier;
- a substrate mounted on top of the carrier;
- a baseplate mounted on top of the substrate to define a cavity between the substrate and the baseplate;
- and
- a single disc resonator hanging from the baseplate by a rigid central support and suspended in the cavity between the substrate and the baseplate, the resonator comprising a plurality of circumferential segments disposed about the rigid central support to define a plurality of circumferential slots and a plurality of electrodes disposed in the plurality of circumferential slots, whereby the resonator can detect movement in multiple orientations.
2 more elements
A method of packaging a planar resonator gyroscope, comprising:
- mounting a planar resonator die comprising a single disc planar resonator hanging from a baseplate by a rigid central support onto a substrate to define a cavity between the substrate and the baseplate, such that the resonator is suspended in the cavity between the substrate and the baseplate, the resonator comprising a plurality of circumferential segments disposed about the rigid central support to define a plurality of circumferential slots and a plurality of electrodes disposed in the plurality of circumferential slots, whereby the resonator can detect movement in multiple orientations;
- mounting the substrate to a carrier;
- and
- securing a cap to the carrier.
1 more element
Dependencies are inferred from the claim text.