Target for X-ray generation, X-ray generator, and method for producing target for X-ray generation
AssigneesTokyo Electron Limited, Hamamatsu Photonics K.K.
InventorsKatsuya Okumura, Katsuji Kadosawa, Tomofumi Kiyomoto, Motohiro Suyama, Atsushi Ishii
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Abstract
A target for X-ray generation has a substrate and a target portion. The substrate is comprised of diamond and has a first principal surface and a second principal surface opposed to each other. A bottomed hole is formed from the first principal surface side in the substrate. The target portion is comprised of a metal deposited from a bottom surface of the hole toward the first principal surface. An entire side surface of the target portion is in close contact with an inside surface of the hole.
Claims15
An X-ray generation target for generating an X-ray with incidence of an electron beam comprising:
- a substrate comprised of diamond and having first and second principal surfaces opposed to each other and a bottomed hole formed from the first principal surface;
- a target portion comprised of a metal deposited from a bottom surface of the hole toward the first principal surface and having a side surface wholly in close contact with an inside surface of the hole;
- and
- a protecting layer protecting the substrate from the electron beam and containing a transition element, the protecting layer is formed on the first principal surface of the substrate.
A method for producing X-ray generation target for generating an X-ray with incidence of an electron beam, comprising:
- a step of preparing a substrate comprised of diamond and having first and second principal surfaces opposed to each other;
- a step of forming a bottomed hole from the first principal surface in the substrate;
- and
- a step of depositing a metal from a bottom surface of the hole toward the first principal surface to form a target portion in the hole,
- wherein the step to form the target portion comprises applying an ion beam to the hole in a metal vapor atmosphere and spraying a material gas containing the metal onto a portion irradiated with the ion beam, so as to deposit the metal by a chemical vapor phase deposition.
An X-ray generation target for generating an X-ray with incidence of an electron beam comprising:
- a substrate comprised of diamond and having first and second principal surfaces opposed to each other and a bottomed hole formed from the first principal surface;
- and
- a target portion comprised of a metal deposited from a bottom surface of the hole toward the first principal surface,
- wherein a diameter of the bottom surface is set smaller than a diameter of an opening end of the hole.
Dependencies are inferred from the claim text.