Method for designing masks used to form electronic components
AssigneeSTMicroelectronics (Rousset) SAS
InventorJulia Castellan
Life of this patent
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Abstract
A method for designing masks adapted to the forming of integrated circuits, including the steps of: (a) forming a first test file including a set of configurations of integrated circuit elements; (b) forming a second test file comprising the elements of the first test file, less the elements corresponding to configurations forbidden by design rule manuals; (c) trans-forming the second test file by means of a set of logical operations implemented by computing means to obtain a mask file; (d) testing the mask file and, if the test is negative, modifying the design rule manuals; and (e) repeating steps (a) to (d) until the test of step (d) is positive.
Claims20
A method for designing masks adapted to the forming of integrated circuits in a considered technology, comprising the steps of:
- (a) forming a first test file comprising a set of randomly-generated configurations of integrated circuit elements not known to comply with design rule manuals;
- (b) forming a second test file comprising all the elements of the first test file, less the elements corresponding to configurations forbidden by design rule manuals;
- (c) transforming the second test file by means of a set of logical operations implemented by computing means to obtain a first mask file representative of a set of masks necessary to obtain an integrated circuit associated with the second test file;
- (d) testing, post generation, the first mask file for compliance with predetermined criteria and, if a post-generation test result is negative, modifying and adapting the design rule manuals and/or the logical operations according to the post-generation test result;
- and
- (e) reiterating steps (b) to (d) as many times as necessary until the post-generation test result of step (d) is positive.
A method for designing masks adapted to the forming of integrated circuits in a considered technology, comprising the steps of:
- (a) forming a first test file comprising a set of configurations of integrated circuit elements not known to comply with design rule manuals, wherein the configurations are generated by using mathematical models of interaction of segments or of polygons;
- (b) forming a second test file comprising all the elements of the first test file, less the elements corresponding to configurations forbidden by design rule manuals;
- (c) transforming the second test file by means of a set of logical operations implemented by computing means to obtain a first mask file representative of a set of masks necessary to obtain an integrated circuit associated with the second test file;
- (d) testing, post generation, the first mask file for compliance with predetermined criteria and, if a post-generation test result is negative, modifying and adapting the design rule manuals and/or logical operations according to the post-generation test result;
- and
- (e) reiterating steps (b) to (d) as many times as necessary until the post-generation test result of step (d) is positive.
A system for generating integrated circuit mask files comprising:
- a processor;
- a test file generator configured to generate a test file comprising a comprehensive set of configurations of integrated circuit elements not known to comply with design rule manuals;
- a design rules manual test section configured to subject the test file to constraints imposed by the design rule manuals and remove from the test file configurations that do not comply with the design rule manuals to produce a revised test file;
- a mask file transformer configured to transform, using logical operations for mask transformation, the revised test file to produce a mask file representative of a set of masks for patterning an integrated circuit associated with the revised test file;
- and
- a post-generation test section configured to subject the mask file to predetermined criteria and, if the mask file fails to meet the predetermined criteria, provide for modification of the design rule manuals and/or logical operations, wherein the processor is configured to cause repeated execution of subjecting the test file to constraints imposed by the design rule manuals, transforming the revised test file, subjecting the mask file to predetermined criteria, and providing for modification of the design rule manuals and/or logical operations until the predetermined criteria are met.
Dependencies are inferred from the claim text.