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US 8,412,368 B2Granted
Method and apparatus for routing dispatching and routing reticles
AssigneeGlobalfoundries Inc.
InventorsDiwaskar Adhikari, Raymond G. Goss
Life of this patent
Estimating the term…
Abstract
A method includes generating a reticle transport job using a computing device. The reticle job identifies a selected reticle. A reticle pod available for transporting the reticle is autonomously identified using the computing device. The reticle transport job is updated suing the computing device with an identifier of the reticle pod.
Claims15
A method, comprising:
- generating a reticle transport job using a computing device, the reticle transport job identifying a selected reticle;
- notifying a photolithography tool of the reticle transport job without identifying a reticle pod for transporting the selected reticle using the computing device;
- autonomously identifying a reticle pod available for transporting the selected reticle using the computing device;
- updating the reticle transport job with an identifier of the identified reticle pod using the computing device;
- and
- notifying the photolithography tool of the updated reticle transport job after identifying the reticle pod using the computing device.
3 more elements
A system, comprising:
- a photolithography tool;
- a material handling system for transporting reticles and wafers to the tool;
- a coordinator operable to generate a reticle transport job identifying a selected reticle required by the photolithography tool, notify the photolithography tool of the reticle transport job without identifying a reticle pod for transporting the reticle, identify a reticle pod available for transporting the selected reticle, update the reticle transport job with an identifier of the identified reticle pod, and notify the photolithography tool of the updated reticle transport job after identifying the reticle pod.
A system, comprising:
- means for generating a reticle transport job using a computing device, the reticle transport job identifying a selected reticle;
- means for notifying a photolithography tool of the reticle transport job without identifying a reticle pod for transporting the selected reticle using the computing device;
- means for autonomously identifying a reticle pod available for transporting the selected reticle using the computing device;
- means for updating the reticle transport job with an identifier of the identified reticle pod using the computing device;
- and
- means for notifying the photolithography tool of the updated reticle transport job after identifying the reticle pod using the computing device.
3 more elements
Dependencies are inferred from the claim text.