Methods and apparatus for automated predictive design space estimation
AssigneeMKS Instruments, Inc.
InventorsErnst Conny Wikström, Hans Georg Joakim Sundström, Tord Åke Börje Nordahl
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AssigneeMKS Instruments, Inc.
InventorsErnst Conny Wikström, Hans Georg Joakim Sundström, Tord Åke Börje Nordahl
Estimating the term…
Described are computer-based methods and apparatuses, including computer program products, for automated predictive design space estimation. A design space of input factors and output responses is estimated for a physical process. Data is received for one or more input factors for a physical process, one or more output responses for the process, and criteria. For each of the one or more input factors, a calculated range of input values within the corresponding experimented range of input values is calculated. A modified range of input values is calculated for each of the one or more input factors. A design space estimate is predicted based at least on the modified ranges of input values, wherein the modified ranges of input values each comprise a largest region of variability for one or more of the input factors where the criteria are fulfilled.
A computerized method for estimating a design space of input factors and output responses for a physical process, comprising:
An apparatus for estimating a design space of a plurality of input factors and output responses for a physical process, comprising a processor configured to:
A computer program product, tangibly embodied in a non-transitory machine-readable storage device, the computer program product including instructions being operable to cause a data processing apparatus to:
A system for estimating a design space of a plurality of input factors and output responses for a physical process, the system comprising:
A computerized method for estimating a design space of input factors and output responses for a physical process, comprising:
Dependencies are inferred from the claim text.