Seek and scan probe (SSP) cantilever stop structures
AssigneeIntel Corporation
InventorsTsung-Kuan Allen Chou, David Harrar, II
Life of this patent
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Abstract
MEMS storage devices and associated systems and structures are generally described. In one example, a micro-electro-mechanical (MEMS) storage device includes a substrate, a lateral actuation structure coupled with the substrate, a micro-electro-mechanical (MEMS) probe coupled with the lateral actuation structure, the MEMS probe having a first end, a second end having a probe tip, and a longitudinal axis extending between the first end and the second end, wherein the second end can be actuated in a direction substantially normal to a surface of the substrate, and one or more stop beam structures coupled with the lateral actuation structure to restrict motion of the MEMS probe in the direction substantially normal to the surface of the substrate.
Claims19
An apparatus, comprising:
- a substrate;
- a lateral actuation structure coupled with the substrate;
- a micro-electro-mechanical (MEMS) probe coupled with the lateral actuation structure by one or more torsional beams, the MEMS probe comprising a beam member comprising a first end, a second end comprising a probe tip, and a longitudinal axis extending between the first end and the second end, each torsional beam comprising an axis about which the torsional beam rotates, the MEMS probe being coupled to the one or more torsional beams along the beam member between the first end and the second end of the beam member, the MEMS probe being rotatably actuated around the axis of each torsional beam so that the second end moves in a direction substantially normal to a surface of the substrate;
- and
- one or more stop beam structures coupled with the lateral actuation structure to restrict motion of the MEMS probe in the direction substantially normal to the surface of the substrate.
A system, comprising:
- a processor;
- and
- a storage device coupled with the processor, wherein the storage device comprises:
- a substrate;
- a lateral actuation structure coupled with the substrate;
- a micro-electro-mechanical (MEMS) probe coupled with the lateral actuation structure by one or more torsional beams the, MEMS probe comprising a beam member comprising a first end, a second end comprising a probe tip, and a longitudinal axis extending between the first end and the second end, each torsional beam comprising an axis about which the torsional beam rotates, the MEMS probe being coupled to the one or more torsional beams along the beam member between the first end and the second end of the beam member, the MEMS probe being rotatably actuated around the axis of each torsional beam so that the second end moves in a direction substantially normal to a surface of the substrate;
- one or more stop beam structures coupled with the lateral actuation structure to restrict motion of the MEMS probe in the direction substantially normal to the surface of the substrate;
- and
- a storage media coupled with the substrate, the storage media being in a plane that is substantially parallel to the surface of the substrate wherein the probe tip of the MEMS probe can read or write, or combinations thereof, to the storage media upon actuation.
Dependencies are inferred from the claim text.