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US 8,411,340 B2Granted
Ultra-wide angle MEMS scanner architecture
AssigneeSi-Ware Systems
InventorsDiaa A. Khalil, Hisham Haddara
Life of this patent
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Abstract
An optical microscanner achieves wide rotation angles utilizing a curved reflector. The optical microscanner includes a moveable mirror for receiving an incident beam and reflecting the incident beam to produce a reflected beam and a Micro Electro-Mechanical System (MEMS) actuator that causes a linear displacement of the moveable mirror. The curved reflector produces an angular rotation of the reflected beam based on the linear displacement of the moveable mirror.
Claims20
An optical microscanner, comprising:
- a moveable mirror optically coupled to receive an incident beam and operable to reflect the incident beam to produce a reflected beam;
- a Micro Electro-Mechanical System (MEMS) actuator coupled to the moveable mirror to cause a linear displacement of the moveable mirror;
- and
- a curved reflector operable to produce an angular rotation of the reflected beam based on the linear displacement of the moveable mirror.
1 more element
A method for fabricating an optical microscanner, comprising:
- providing a silicon on insulator (SOI) wafer including a top surface and a bottom surface;
- photolithographically defining within the top surface of the SOI wafer a moveable mirror optically coupled to receive an incident beam and operable to reflect the incident beam to produce a reflected beam, a Micro Electro-Mechanical System (MEMS) actuator coupled to the moveable mirror to cause a linear displacement of the moveable mirror and a curved reflector operable to produce an angular rotation of the reflected beam based on the linear displacement of the moveable mirror;
- and
- etching between the top surface of the SOI wafer and the bottom surface of the SOI wafer to release the moveable mirror and the actuator.
1 more element
Dependencies are inferred from the claim text.