Lithographic apparatus and positioning apparatus
AssigneeASML Netherlands B.V.
InventorsNoud Jan Gilissen, Theodorus Petrus Maria Cadee
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Abstract
A lithographic apparatus includes a movable first object, and a heat exchanger including a heat exchanging body, the heat exchanging body including a material with electro-caloric or magneto-caloric properties and configured to affect the temperature of the first object by exchanging heat with the movable first object, and a generator configured to supply an electromagnetic field to the heat exchanging body to change the temperature of the heat exchanging body in order to cool or heat the first object.
Claims15
A lithographic apparatus comprising:
- a moveable first object;
- and
- a heat exchanger comprising
- a heat exchanging body comprising a material with electro-caloric or magneto-caloric properties and configured to affect the temperature of the moveable first object by exchanging heat with the moveable first object, the heat exchanging body and the moveable first object being moveable relative to each other, and
- a generator configured to supply an electromagnetic field to the heat exchanging body to change the temperature of the heat exchanging body in order to cool or heat the first object.
A positioning apparatus configured to position a first object with respect to a second object, the apparatus comprising a heat exchanger comprising:
- a heat exchanging body, which comprises a material with electro-caloric or magneto-caloric properties and is configured to exchange heat with the first object and the second object;
- a generator configured to supply an electromagnetic field to the heat exchanging body to change the temperature of the heat exchanging body in order to cool or heat the first object, wherein the heat exchanging body is configured to exchange heat with the first object in a first position, and to exchange heat with the second object in a second position;
- and
- a positioning system configured to move at least a portion of the heat exchanging body between the first and second position.
Dependencies are inferred from the claim text.