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US 8,410,806 B2Granted
Replaceable coupon for a probing apparatus
AssigneeCascade Microtech, Inc.
InventorKenneth R. Smith
Life of this patent
Estimating the term…
Abstract
The contacts of a probing apparatus are elastically supported on a replaceable coupon and electrically interconnected with conductors on a membrane or a space transformer.
Claims16
A coupon for a probing apparatus including a dielectric support having a support surface including surface portions exposing a support conductor, said coupon comprising:
- (a) a first coupon surface detachably adhered to said support surface;
- (b) a second coupon surface elastically separated from said first coupon surface;
- (c) a contact including a contact tip arranged to engage a device surface, said device surface located nearer said second coupon surface than said first coupon surface;
- and
- (d) a post having a first end substantially flush with said second coupon surface and a second end substantially flush with said first coupon surface.
2 more elements
A probing apparatus comprising:
- (a) a support conductor;
- (b) a dielectric support including a support surface having surface portions exposing said support conductor;
- (c) a coupon having a first coupon surface detachably adhered to said support surface and a second coupon surface elastically separated from said first coupon surface;
- (d) a contact including a contact tip arranged to engage a device surface, said device surface located nearer said second coupon surface than said first coupon surface;
- and
- (e) a post having a first end substantially flush with said second coupon surface and a second end substantially flush with said first coupon surface.
3 more elements
Dependencies are inferred from the claim text.