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US 8,410,670 B2Granted
Laminate and method of manufacturing the same
AssigneeNGK Insulators, Ltd.
InventorsTakaaki Koizumi, Naoki Ogawa
Life of this patent
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Abstract
A laminate includes a ceramic substrate, a piezoelectric element, and an intermediate layer. The piezoelectric element includes a lower electrode. The intermediate layer is formed between the substrate and the lower electrode of the piezoelectric element. The intermediate layer contains a metal or an oxide thereof as a main component. The metal is different from a metal contained in the lower electrode. The intermediate layer further contains holes.
Claims2
A laminate comprising:
- a ceramic substrate;
- a metal film provided on the ceramic substrate;
- and
- an intermediate layer provided between said metal film and the ceramic substrate, the intermediate layer containing a metal and/or an oxide thereof as a main component and having a hole, the metal being different from a metal contained in said metal film;
- said laminate further comprising a ceramic layer provided on the metal film opposite to the ceramic substrate, wherein said intermediate layer includes a ceramic material which is the same as the ceramic material contained in said ceramic layer and embedded in the hole.
2 more elements
Dependencies are inferred from the claim text.