MEMS kinetic energy conversion
AssigneeTaiwan Semiconductor Manufacturing Company, Ltd.
InventorsTien-Kan Chung, Chung-Hsien Lin, Yao-Te Huang, Chia-Hua Chu, Chia-Ming Hung, Wen-Chuan Tai, Chang-Yi Yang
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Abstract
The present disclosure provides a micro device. The device has a micro-electro-mechanical systems (MEMS) movable structure, a plurality of metal loops over the MEMS movable structure, and a piezoelectric element over the MEMS movable structure. Frontside and backside capping wafers are bonded to the MEMS structure, with the frontside and backside capping wafers encapsulating the MEMS movable structure, the plurality of metal loops, and the piezoelectric element. The device further includes a magnet disposed on the frontside capping wafer over the plurality of metal loops.
Claims14
A micro device, comprising:
- a micro-electro-mechanical systems (MEMS) structure including a MEMS movable structure;
- a plurality of metal loops over the MEMS movable structure;
- a piezoelectric element over the MEMS movable structure;
- frontside and backside capping wafers bonded to the MEMS structure, the frontside and backside capping wafers encapsulating the MEMS movable structure, the plurality of metal loops, and the piezoelectric element;
- and
- a magnet disposed on the frontside capping wafer over the plurality of metal loops.
A micro device, comprising:
- a micro-electro-mechanical systems (MEMS) structure including a MEMS movable structure;
- a metal coil over the MEMS movable structure;
- a piezoelectric element over the MEMS movable structure, the piezoelectric element including a bottom metal layer, an aluminum nitride (AlN) layer over the bottom metal layer, and a top metal layer over the AlN layer;
- frontside and backside capping wafers bonded to the MEMS structure, the frontside and backside capping wafers encapsulating the MEMS movable structure, the metal coil, and the piezoelectric element;
- and
- a magnet disposed on the frontside capping wafer over the metal coil.
Dependencies are inferred from the claim text.