US 8,410,659 B2 · Electromechanical transducer and manufacturing method therefor

Abstract

An electromechanical transducer includes a vibration membrane provided with a first electrode, a substrate provided with a second electrode, and a support member adapted to support the vibration membrane in such a manner that a gap is formed between the vibration membrane and the substrate, with the first and second electrodes being arranged in opposition to each other, wherein a part of the vibration membrane and a part of the substrate are in contact with each other at a contact region, and another region of the vibration membrane other than the contact region is able to vibrate; an overlap region is provided between the first electrode and second electrode in the contact region, and at least one of these electrodes has a through portion formed therethrough in at least a part of the overlap region, and a plurality of protrusions formed within the gap and on at least one of the vibration member and the support member, wherein the contact region is surrounded by the plurality of protrusions.

Claims14

Dependent claims

An electromechanical transducer comprising:

a vibration membrane provided with a first electrode;
a substrate provided with a second electrode;
and
a support member adapted to support said vibration membrane in such a manner that a gap is formed between said vibration membrane and said substrate, with the first and second electrodes being arranged in opposition to each other;
wherein a part of said vibration membrane and a part of said substrate are in contact with each other at a contact region, and another region of said vibration membrane other than the contact region is able to vibrate;
a first region is provided within the contact region, with at least one of the first electrode and second electrode not formed in the first region;
and
a plurality of protrusions formed within the gap and on at least one of said vibration member and said support member, wherein
the contact region is surrounded by the plurality of protrusions,
the protrusions are not formed in a central part of the vibration membrane, and
the central part of the vibration membrane and the substrate are in contact with each other.

8 more elements

A method for manufacturing an electromechanical transducer, in which the electromechanical transducer includes a vibration membrane provided with a first electrode, a substrate provided with a second electrode, and a support member adapted to support the vibration membrane in such a manner that a gap is formed between the vibration membrane and the substrate, with the first and second electrodes being arranged in opposition to each other

the method comprising:
a step of providing a contact region where a part of the vibration member and a part of the substrate are in contact with each other, and providing another region where the vibration membrane is able to vibrate;
and
a step of providing a first region within the contact region, with at least one of the first electrode and second electrode not formed in the first region;
a step of forming a plurality of protrusions within the gap and on at least one of the vibration member and the support member;
and
a step of locating the plurality of protrusions to surround the contact region,
wherein the protrusions are not formed in a central part of the vibration membrane, and
the central part of the vibration membrane and the substrate are in contact with each other.

6 more elements

Dependencies are inferred from the claim text.

Electromechanical transducer and manufacturing method therefor

Life of this patent

Electromechanical transducer and manufacturing method therefor

Life of this patent

Abstract

Claims14