Electromigration reduction in micro-hotplates
AssigneeCambridge CMOS Sensors Ltd.
InventorsSyed Zeeshan Ali, Florin Udrea, Julian William Gardner
Life of this patent
Estimating the term…
Abstract
A micro-hotplate is provided in the form of a device comprising a sensor and one or more resistive heaters within the micro-hotplate arranged to heat the sensor. Furthermore a controller is provided for applying a bidirectional drive current to at least one of the heaters to reduce electromigration. The controller also serves to drive the heater at a substantially constant temperature.
Claims26
A micro-hotplate comprising a sensor and one or more resistive heaters arranged to heat the sensor, wherein a controller is provided for applying a bidirectional drive current to at least one of the heaters to reduce electromigration.
A micro-hotplate in the form of a device comprising a sensor and one or more resistive heaters arranged to heat the sensor, wherein a controller is provided for applying a bidirectional drive current to at least one of the heaters to reduce ion diffusion.
A method of manufacturing a micro-hotplate comprising a sensor and one or more resistive heaters arranged to heat the sensor, the method comprising:
- applying a bidirectional drive current to at least one of the heaters to reduce electromigration.
Dependencies are inferred from the claim text.