Pulsed growth of catalyst-free growth of GaN nanowires and application in group III nitride semiconductor bulk material
AssigneeStc.Unm
InventorsStephen D. Hersee, Xin Wang, Xinyu Sun
Life of this patent
Estimating the term…
Loading patent…
AssigneeStc.Unm
InventorsStephen D. Hersee, Xin Wang, Xinyu Sun
Estimating the term…
Exemplary embodiments provide semiconductor devices including high-quality (i.e., defect free) group III-N nanowires and uniform group III-N nanowire arrays as well as their scalable processes for manufacturing, where the position, orientation, cross-sectional features, length and the crystallinity of each nanowire can be precisely controlled. A pulsed growth mode can be used to fabricate the disclosed group III-N nanowires and/or nanowire arrays providing a uniform length of about 10 nm to about 1000 microns with constant cross-sectional features including an exemplary diameter of about 10-1000 nm. In addition, high-quality GaN substrate structures can be formed by coalescing the plurality of GaN nanowires and/or nanowire arrays to facilitate the fabrication of visible LEDs and lasers. Furthermore, core-shell nanowire/MQW active structures can be formed by a core-shell growth on the nonpolar sidewalls of each nanowire.
A nanowire array comprising:
A nanowire array comprising:
A nanowire array comprising:
A nanowire array comprising:
Dependencies are inferred from the claim text.