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AssigneeNational Chip Implementation Center National Applied Research Laboratories
InventorsChin-Fong Chiu, Ying Zong Juang, Hann Huei Tsai, Sheng-Hsiang Tseng, Chen-Fu Lin
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The present invention discloses a CMOS-MEMS cantilever structure. The CMOS-MEMS cantilever structure includes a substrate, a circuit structure, and a cantilever beam. The substrate has a circuit area and a sensor unit area defined thereon. The circuit structure is formed in the circuit area. The cantilever beam is disposed in the sensor unit area with one end floating above the substrate and the other end connecting to the circuit structure. With the above arrangement, the manufacturing process of CMOS-MEMS cantilever structure of this invention can be simplified. Furthermore, the structure of the cantilever beam is thinned down and therefore has a higher sensitivity.
A CMOS-MEMS cantilever structure, comprising:
A CMOS-MEMS cantilever structure, comprising:
Dependencies are inferred from the claim text.