Sample transfer device and sample transferring method

A sample transfer method for transferring a sample to a charged particle beam apparatus, the method comprising steps of:

• inserting to a globe box a sample transfer device having an expansible hollow member capable of accommodating a sample holder mounting the sample, a fixing member for fixing said sample holder within said expansible hollow member;
• and a sealing member communicating with the interior of said expansible hollow member to open/close an opening through which said sample holder passes;
• mounting said sample to said sample holder within said globe box;
• fixing said sample holder within the expansible hollow member of said sample transfer device;
• and
• closing said opening by means of said sealing member so as to transfer said sample holder to said charged particle beams apparatus.

A charged particle beam apparatus comprising:

• a charged particle beam source;
• a conversion lens for converging said charged particle beam;
• an objective lens for focusing said charged particle beam onto sample;
• and
• a sample transfer device for transferring the sample, the sample transfer device comprising:
• an expansible hollow member capable of accommodating a sample holder mounting the sample;
• a fixing member for fixing said sample holder within said expansible hollow member;
• and
• a sealing member communicating with the interior of said expansible hollow member to open/close an opening through which said sample holder passes,
• wherein said sample holder is attached to said charged particle beam apparatus through said opening by shrinking said expansible hollow member.