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US 8,410,443 B1Granted
Integrated backscattered electron detector with cathodoluminescence collection optics
AssigneeGatan, Inc.
InventorsDavid J. Stowe, John Hunt, Simon A. Galloway
Life of this patent
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Abstract
An apparatus for simultaneous detection of backscattered electrons and photons from a sample. The device includes a direct detection backscattered electron detector and a photon detector. The backscattered electron detector has a reflective surface that reflects photons emitted by the sample onto the photon detector.
Claims12
An apparatus for detection of backscattered electrons and photons from a sample, comprising:
- a direct detection backscattered electron detector;
- and
- a photon detector;
- wherein said backscattered electron detector comprises a reflective surface that reflects photons emitted by the sample onto said photon detector.
1 more element
An apparatus for detection of backscattered electrons and photons from a sample, comprising:
- a direct detection backscattered electron detector;
- a photon detector;
- and
- an optical element;
- wherein said backscattered electron detector is affixed within said optical element.
2 more elements
Dependencies are inferred from the claim text.