X-ray detector for electron microscope
AssigneePEI, Inc.
InventorsHanno Sebastian Von Harrach, Bert Freitag, Pleun Dona
Life of this patent
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Abstract
Multiple detectors arranged in a ring within a specimen chamber provide a large solid angle of collection. The detectors preferably include a shutter and a cold shield that reduce ice formation on the detector. By providing detectors surrounding the sample, a large solid angle is provided for improved detection and x-rays are detected regardless of the direction of sample tilt.
Claims21
A method of determining three-dimensional positional and compositional information about a microscopic specimen, comprising:
- scanning an electron beam across the sample;
- detecting x-rays characteristic of the material in the sample using multiple x-ray angularly spaced around the sample, the x-rays caused to be emitted from the sample by the impact of the electron beam;
- determining from the difference in the x-ray signals detected by the multiple detectors the position of the source of the x-rays along the beam direction;
- and
- improving the accuracy of compositional information by means of the difference in attenuation of the x-ray signal detected by the multiple detectors.
A method of determining three-dimensional positional and compositional information about a microscopic specimen, comprising:
- scanning an electron beam across the sample;
- detecting x-rays characteristic of the material in the sample using multiple x-ray angularly spaced around the sample, the x-rays caused to be emitted from the sample by the impact of the electron beam;
- and
- determining from the difference in the x-ray signals detected by the multiple detectors the position of the source of the x-rays along the beam direction.
A method of determining characteristics of a material, comprising:
- directing an electron beam to impact the surface of a sample;
- detecting x-rays caused to be emitted from the sample by the impact of the electron beam and characteristic of the material in the sample using at least two x-ray detectors angularly spaced around the sample and within the lens of a transmission electron microscope;
- cooling a cold shield at least partly surrounding the detector;
- and
- providing heat to maintain the detector at a higher temperature than the cold shield.
Dependencies are inferred from the claim text.