Charged particle beam device

A charged particle beam device having a charged particle generation source, a sample stage on which a sample to be irradiated with a first charged particle beam of charged particles generated at the charged particle generation source is placed, an irradiation optical system that irradiates the sample with the first charged particle beam, an imaging optical system which makes a second charged particle beam emitted or reflected from the sample irradiated with the first charged particle beam form an image, a beam detection unit that detects the second charged particle beam having formed an image, an irradiation optical system control section that controls the irradiation optical system, an imaging optical system control section that controls the imaging optical system, a stage control unit that controls the sample stage, an image processing unit that acquires an image from a signal detected by the beam detection unit, and a device control unit that systematically controls the irradiation optical system control section, the imaging optical system control section, the stage control unit and the image processing unit, the charged particle beam device comprising:

• a tilt detection unit that detects a surface tilt of the sample;
• a charged particle beam control unit in which an electric field and a magnetic field are overlapped with each other, which makes the first charged particle beam incident perpendicularly on the sample according to a surface tilt of the sample detected by the tilt detection unit and which deflects the first charged particle beam to align a trajectory thereof with an optical axis center of the irradiation optical system and the second charged particle beam to align a trajectory thereof with an optical axis center of the imaging optical system;
• and
• a power supply unit that supplies electric power to the charged particle beam control unit;
• wherein the irradiation optical system control section aligns an optical axis of the irradiation optical system using a first sample;
• wherein the imaging optical system control section aligns an optical axis of the imaging optical system using the first sample;
• wherein the device control unit adjusts, according to a surface tilt detected by the tilt detection unit of a second sample to be observed, an electric field and a magnetic field of the charged particle beam control unit by referring to a lookup table and controlling the power supply unit such that the first charged particle beam is incident perpendicularly on the surface of the second sample, such that a trajectory of the first charged particle beam is aligned with an optical axis center of the irradiation optical system, and such that a trajectory of the second charged particle beam is aligned with an optical axis center of the imaging optical system;
• wherein the beam detection unit detects the second charged particle beam deflected so as to travel along the optical axis center of the imaging optical system;
• and
• wherein the image processing unit acquires an image based on a signal detected by the beam detection unit.