High precision, rapid laser hole drilling
AssigneeLawrence Livermore National Security, LLC
InventorsJim J. Chang, Herbert W. Friedman, Brian J. Comaskey
Life of this patent
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Abstract
A laser system produces a first laser beam for rapidly removing the bulk of material in an area to form a ragged hole. The laser system produces a second laser beam for accurately cleaning up the ragged hole so that the final hole has dimensions of high precision.
Claims11
Apparatus for drilling holes in a first material positioned on a second material, wherein said first material has a bottom surface, comprising,
- a laser system that produces a first laser beam for rapidly removing the bulk of material in an area in said first material to form a ragged hole in said first material,
- a control connected to said laser system that controls said laser that produces a first laser beam for rapidly removing the bulk of material in an area in said first material to form a ragged hole in said first material and stops said first laser beam in forming a ragged hole before said ragged hole reaches said bottom surface leaving a membrane between said ragged hole and said bottom surface, and
- a second laser beam for accurately cleaning up said ragged hole so that the final hole has dimensions of high precision, wherein said control connected to said laser system controls said second laser beam for accurately cleaning up said ragged hole so that the final hole has dimensions of high precision and for producing said final hole that has dimensions of high precisions is produced through said membrane to said bottom surface providing said final hole that has dimensions of high precisions through the first material to the second material.
An apparatus for drilling holes in a first material positioned on a second material, wherein said first material has a bottom surface, comprising,
- a laser system that produces a first laser beam for rapidly removing the bulk of material in an area in said first material to form a ragged hole in said first material,
- a control connected to said laser system that controls said laser that produces a first laser beam for rapidly removing the bulk of material in an area in said first material to form a ragged hole in said first material and stops said first laser beam in forming a ragged hole before said ragged hole reaches said bottom surface leaving a membrane between said ragged hole and said bottom surface, and
- a second laser beam for accurately cleaning up said ragged hole so that the final hole has dimensions of high precision, wherein said control connected to said laser system controls said second laser beam for accurately cleaning up said ragged hole so that the final hole has dimensions of high precision and for producing said final hole that has dimensions of high precisions is produced through said membrane to said bottom surface providing said final hole that has dimensions of high precisions through the first material to the second material, wherein said laser system comprises a single laser that produces said first laser beam and said second laser beam.
An apparatus for drilling holes in a first material positioned on a second material, wherein said first material has a bottom surface, comprising,
- a laser system that produces a first laser beam for rapidly removing the bulk of material in an area in said first material to form a ragged hole in said first material,
- a control connected to said laser system that controls said laser that produces a first laser beam for rapidly removing the bulk of material in an area in said first material to form a ragged hole in said first material and stops said first laser beam in forming a ragged hole before said ragged hole reaches said bottom surface leaving a membrane between said ragged hole and said bottom surface, and
- a second laser beam for accurately cleaning up said ragged hole so that the final hole has dimensions of high precision, wherein said control connected to said laser system controls said second laser beam for accurately cleaning up said ragged hole so that the final hole has dimensions of high precision and for producing said final hole that has dimensions of high precisions is produced through said membrane to said bottom surface providing said final hole that has dimensions of high precisions through the first material to the second material, wherein said laser system comprises a first laser that produces said first laser beam and a second laser that produces said second laser beam.
Dependencies are inferred from the claim text.