Ceramic member, probe holder, and method for manufacturing ceramic member
AssigneeNHK Spring Co., Ltd.
InventorsKohei Suzuki, Shinya Miyaji, Shinji Saito, Noriyoshi Kaneda
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Abstract
Provided are a ceramic member being a sintered body including at least forsterite and boron nitride as major components, and in which the boron nitride is oriented in one direction, a probe holder formed by using the ceramic member, and a method for manufacturing the ceramic member. In the ceramic member, the index of orientation preference is equal to or lower than 0.07, and the coefficient of thermal expansion at 20 to 300° C. in a direction parallel to the direction of orientation is (3 to 5)×10−6/° C., or the three-point bending strength based on JIS R 1601 is equal to or higher than 250 MPa.
Claims6
A ceramic member being a sintered body and comprising at least forsterite and boron nitride as major components, wherein
- the boron nitride is oriented in one direction.
A probe holder that includes a through hole into which a probe formed of a conductive material is capable of being inserted, and that houses the probe, the probe holder comprising:
- a base material formed by using a ceramic member being a sintered body and comprising at least forsterite and boron nitride as major components, wherein the boron nitride is oriented in one direction,
- wherein the through hole is formed in a direction perpendicular to the direction of orientation of the boron nitride in the base material.
Dependencies are inferred from the claim text.