Image sensor with improved color crosstalk
AssigneeIntellectual Ventures II LLC
InventorJaroslav Hynecek
Life of this patent
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Abstract
An image sensor comprises a substrate of a first conductivity type. First and second pixels are arrayed over the substrate. A potential barrier is formed in a region of the substrate corresponding to the first pixel but not in a region of the substrate corresponding to the second pixel. The second pixel is responsive to a color having a wavelength longer than the color to which the first pixel is responsive. The potential barrier is doped with dopants by a high energy ion implantation dopants or by an ion implantation or diffusion during epitaxial growth of the P-type epitaxial layer.
Claims14
A method of forming an image sensor, the method comprising:
- forming an epitaxial layer without a potential barrier and including a first region corresponding to a first photodiode, a second region corresponding to a second photodiode, and a thickness between a top surface of the epitaxial layer and an interface of the epitaxial layer with a substrate;
- implanting ions within the epitaxial layer without the potential barrier to form a potential barrier in the first region but not in the second region;
- wherein the potential barrier is separated from the top surface by an upper portion of the first region;
- and
- wherein the potential barrier is separated from the interface by a lower portion of the first region.
A method of forming an image sensor, the method comprising:
- forming an epitaxial layer without a potential barrier including a first region corresponding to a first photodiode, a second region corresponding to a second photodiode, a third region corresponding to a third photodiode, and a thickness between a top surface of the epitaxial layer and an interface of the epitaxial layer with a substrate;
- implanting ions within the epitaxial layer without the potential barrier to form a potential barrier in the first region and the third region, but not in the second region;
- wherein the potential barrier is separated from the top surface by an upper portion of the first region and an upper portion of the third region;
- and
- wherein the potential barrier is separated from the interface by a lower portion of the first region and a lower portion of the third region.
Dependencies are inferred from the claim text.