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US 8,409,880 B2Granted
Method for use in making electronic devices having thin-film magnetic components
AssigneeCrocus Technologies
InventorsJean Pierre Nozieres, Jason Reid
Life of this patent
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Abstract
Disclosed herein is a method of forming electronic device having thin-film components by using trenches. One or more of thin-film components is formed by depositing a thin-film in the trench followed by processing the deposited thin-film to have the desired thickness.
Claims16
A method of forming a device, comprising:
- providing a substrate comprising a first magnetic layer, wherein a tunnel junction layer is disposed on the first magnetic layer;
- depositing a trench layer on the tunnel junction layer;
- etching the trench layer to form a trench, wherein the etching is stopped by the tunnel junction layer, and wherein a portion of the tunnel junction layer is exposed at the bottom of the trench;
- depositing a stack of thin films in the trench and on the trench layer;
- and
- processing the deposited stack of thin films and the trench layer to form a plurality of thin-film components of the device within the trench.
3 more elements
Dependencies are inferred from the claim text.