Laser pattern mask and method for fabricating the same
AssigneeLG Display Co., Ltd.
InventorsSun-Ju Ku, Jun-Ho Choi
Life of this patent
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Abstract
The present invention relates to a laser pattern mask, and a method for fabricating the same, which can prevent a laser pattern mask from being damaged by coating a protective film on a surface of a laser pattern mask for patterning an entire layer on a mother substrate at a time by laser ablation. The laser pattern mask includes a base substrate, a laser shielding pattern formed of a non-transparent metal on the base substrate to define laser pass through regions, and a protective film formed on an entire surface of the base substrate including the laser shielding pattern.
Claims6
A laser pattern mask comprising;
- a base substrate;
- a laser shielding pattern formed of an opaque metal on the base substrate to define laser beam pass through regions;
- and
- a protective film formed on an entire surface of the base substrate including the laser shielding pattern;
- wherein the laser shielding pattern is formed of Ag and the protective film is formed of SiO2,
- wherein an entire layer on a mother substrate is patterned at a time by applying a laser beam to the laser pattern mask, and
- wherein the protective film formed on the laser beam pass through regions is flush with the protective film formed on the laser shielding pattern.
A method for fabricating a laser pattern mask comprising the steps of:
- forming a laser shielding pattern of an opaque metal on a base substrate to define laser beam pass through regions;
- and
- forming a protective film on an entire surface of the base substrate including the laser shielding pattern;
- wherein the laser shielding pattern is formed of Ag and the protective film is formed of SiO2,
- wherein an entire layer on a mother substrate is patterned at a time by applying a laser beam to the laser pattern mask, and
- wherein the protective film formed on the laser beam pass through regions is flush with the protective film formed on the laser shielding pattern.
Dependencies are inferred from the claim text.