Preparation process of microbeads, and microbeads
AssigneeSony Corporation
InventorsKenzo Machida, Noriyuki Kishii, Mari Ichimura, Masanobu Tanaka
Life of this patent
Estimating the term…
Abstract
The present application provides a process for the preparation of microbeads, including the steps of: patterning a thin film, which has been formed on a substrate, into microbead regions of at least one predetermined shape by photolithography; immobilizing a predetermined substance on the thus-patterned microbead regions; and stripping off, from the substrate, the thus-patterned microbead regions with the substance immobilized thereon.
Claims10
A process for the preparation of microbeads, comprising:
- patterning a thin film, which has been formed on a substrate, into microbead regions of predetermined shape by photolithography;
- immobilizing a predetermined substance on the patterned microbead regions;
- and
- stripping off, from the substrate, the patterned microbead regions with the substance immobilized thereon,
- wherein the formation of the thin film is conducted after forming on the substrate a sacrificial layer formed of a fluorinated organic material layer and capable of being physically or chemically etched in the stripping step, and
- wherein in stripping, the patterned microbead regions are removed from the substrate by causing the fluorinated organic material layer to sublimate.
A microbead composition comprising microbeads obtained by a process for the preparation of microbeads, comprising the steps of:
- patterning a thin film, which has been formed on a substrate, into microbead regions of predetermined shape by photolithography;
- immobilizing a predetermined substance on the patterned microbead regions;
- and
- stripping off, from the substrate, the thus-patterned microbead regions with the substance immobilized thereon.
A process for the preparation of microbeads, comprising:
- patterning a thin film, which has been formed on a substrate, into microbead regions of predetermined shape by photolithography;
- immobilizing a predetermined substance on the patterned microbead regions;
- and
- stripping off, from the substrate, the patterned microbead regions with the substance immobilized thereon,
- wherein the formation of the thin film is conducted after forming on the substrate a sacrificial layer formed of a fluorinated organic material layer and capable of being physically or chemically etched in the stripping step, and
- wherein in stripping, the patterned microbead regions are removed from the substrate by dissolving the fluorinated organic material layer with a fluorinated solvent.
Dependencies are inferred from the claim text.