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US 8,409,690 B2Granted
Patterned nanowires
AssigneeIntel Corporation
InventorsCharles H. Wallace, Matthew L. Tingey, Bradford L. Sun, Timothy L. Hehr
Life of this patent
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Abstract
Nanowires suspended from a substrate surface and methods of making nanowires suspended from a substrate surface are provided. The suspended nanowires are comprised of a variety of materials, including metals and mixtures of metals. Suspended nanowires supply large surface areas for applications such as, for example, energy storage and catalysis. Embodiments of the invention provide three dimensional nanowires attached to a substrate surface and arrays of three dimensional nanowires.
Claims11
A device comprising,
- a substrate having, a surface wherein the surface comprises a plurality of raised features wherein the raised features have a height of between 10 nm and 500 nm above the substrate surface,
- between 10 and 108 coplanar nanowires wherein the nanowires are attached to the substrate surface through their contact with at least two raised features and a section of each nanowire is separated from the substrate surface by a gap wherein the gap has a height of between 10 nm and 500 nm and the edge to edge distance between nearest neighbor nanowires is a value between 10 nm and 500 nm.
Dependencies are inferred from the claim text.