Method for reducing contact resistance of a thermally and electrically conductive structure comprising carbon nanotube
AssigneeIntel Corporation
InventorsLinda A. Shekhawat, Nachiket R. Raravikar
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Abstract
A thermally and electrically conductive structure comprises a carbon nanotube (110) having an outer surface (111) and a carbon coating (120) covering at least a portion of the outer surface of the carbon nanotube. The carbon coating may be applied to the carbon nanotube by providing a nitrile-containing polymer, coating the carbon nanotube with the nitrile-containing polymer, and pyrolyzing the nitrile-containing polymer in order to form the carbon coating on the carbon nanotube. The carbon nanotube may further be coated with a low contact resistance layer (130) exterior to the carbon coating and a metal layer (140) exterior to the low contact resistance layer.
Claims3
A method of reducing a contact resistance of a carbon nanotube, the method comprising:
- providing a nitrile-containing polymer;
- coating the carbon nanotube with the nitrile-containing polymer;
- pyrolyzing the nitrile-containing polymer in order to form a carbon coating on the carbon nanotube;
- forming a low contact resistance layer exterior to the carbon coating;
- and
- forming a metal layer exterior to the low contact resistance layer.
Dependencies are inferred from the claim text.