Apparatus and method for the production of trisilylamine
AssigneeVoltaix, Inc.
InventorGary D. Miller
Life of this patent
Estimating the term…
Abstract
There is described an apparatus, a tubular laminar flow, plug flow reactor, for making silylamines and particularly trisilylamine (TSA) in high yields from ammonia gas and a monohalosilane gas. The apparatus can be a tubular flow reactor comprising a first portion of the reactor defining a gas entry zone, a second portion of the reactor defining a reaction zone and a third portion of the reactor defining a separation zone, the reaction zone providing a reactant contacting region. Trisilylamine can be recovered in the separation zone in a cold trap collection vessel.
Claims30
A tubular laminar flow plug flow gas reactor for synthesis of silylamines comprising:
- (a) a first portion of the tubular laminar flow reactor defining a gas entry zone, a second portion of the tubular laminar flow reactor defining a reaction zone and a third portion of the reactor defining a separation zone, the reaction zone providing a reactant contacting region;
- (b) one or more first conduits positioned substantially parallel to the central, longitudinal axis of the flow reactor extending into the gas entry zone and terminating in the reaction zone, the one or more conduits directing a laminar flow of a first reactant gas into the reaction zone;
- (c) one or more second gas entry conduits positioned upstream of the one or more first conduits directing a flow of a second reactant gas into the gas entry zone to form a flow of the second reactant gas which passes into the reaction zone;
- (d) the reaction zone wherein the first reactant gas and the second reactant gas come in contact with one another forming a reactant stream;
- (e) a filter positioned at the downstream end of the reaction zone;
- (f) a gas exit port directing the flow of the reactant stream from the reaction zone to a first collection zone;
- (g) the first collection zone comprising a first collector removing reaction product from the reactant stream.
A tubular laminar flow plug flow gas reactor for synthesis of trisilylamine comprising:
- (a) a first portion of the tubular laminar flow reactor defining a gas entry zone, a second portion of the tubular laminar flow reactor defining a reaction zone and a third portion of the reactor defining a separation zone, the reaction zone providing a reactant contacting region;
- (b) one or more conduits positioned substantially parallel to the central, longitudinal axis of the flow reactor extending into the gas entry zone and terminating in the reaction zone, the one or more conduits directing a laminar flow of a first reactant gas into the reaction zone;
- (c) one or more gas entry conduits positioned upstream of the one or more conduits directing a flow of a second reactant gas into the gas entry zone to form a flow of the second reactant gas which passes into the reaction zone;
- (d) the reaction zone wherein the first reactant gas and the second reactant gas come in contact with one another forming a reactant stream;
- (e) a filter positioned at the downstream end of the reaction zone;
- (f) a gas exit port directing the flow of the reactant stream from the reaction zone to a first collection zone;
- (g) the first collection zone comprising a first collector removing reaction product from the reactant stream;
- and wherein the internal reactor pressure is maintained at less than one atmosphere and the first reactant gas is ammonia and the second reactant gas is monochlorosilane.
Dependencies are inferred from the claim text.