Porous member
AssigneeTokyo Electron Limited
InventorsJiro Higashijima, Satoshi Kaneko
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Abstract
According to one embodiment of the present invention, there is provided a porous member formed by providing a member formed of a fluororesin containing carbon fiber and having a predetermined shape and exposing the member to an oxidizing gas to remove the carbon fiber contained in the member.
Drawings
Claims5
A method for manufacturing a porous member comprising:
- providing a member formed of a fluororesin containing a carbon material and having a predetermined shape and
- exposing the member to an oxidizing gas to remove the carbon fiber contained in the member.
Dependencies are inferred from the claim text.