Production process for structure and production process for liquid discharge head
AssigneeCanon Kabushiki Kaisha
InventorsEtsuko Hino, Shoji Shiba
Life of this patent
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Abstract
A production process for a structure includes preparing a substrate on which a first layer and a second layer are provided in this order; forming a second mold, which is a part of a mold member serving as a mold for forming the structure, from the second layer; etching the first layer using the second mold as a mask and thereby forming a first mold, which is another part of the mold member from the first layer; providing a coating layer which serves as the structure to cover the first mold and the second mold; and removing the first mold and the second mold and thereby forming the structure.
Claims6
A production process for a structure, comprising:
- preparing a substrate on which a first layer and a second layer are provided in this order;
- forming a second mold from the second layer, the second mold being a part of a mold member;
- etching the first layer using the second mold as a mask and thereby forming a first mold from the first layer, the first mold being another part of the mold member;
- providing a coating layer to cover the first mold and the second mold;
- and
- removing the first mold and the second mold, a portion formed by removing the first layer and the second layer being a space enclosed by the coating layer, and thereby forming the structure from the coating layer.
A production process for a liquid discharge head having a liquid discharge port through which liquid is discharged and a flow channel wall member containing a wall of a liquid flow channel which communicates with the liquid discharge port, the production process comprising:
- preparing a substrate on which a first layer and a second layer are provided in this order;
- forming a second mold from the second layer, the second mold being a part of a mold member serving as a mold for forming the structure;
- etching the first layer using the second mold as a mask and thereby forming a first mold from the first layer, the first mold being another part of the mold member;
- providing a coating layer to cover the first mold and the second mold, the coating layer forming the structure;
- removing the first mold and the second mold and thereby forming the structure from the coating layer;
- and
- forming an opening which serves as the liquid discharge port through the coating layer,
- wherein a space formed by removing the first mold and the second mold serves as the flow channel.
Dependencies are inferred from the claim text.