Silicon purification method
AssigneeUlvac, Inc.
InventorsYasuo Ookubo, Youichi Hirose, Hiroshi Nagata
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AssigneeUlvac, Inc.
InventorsYasuo Ookubo, Youichi Hirose, Hiroshi Nagata
Estimating the term…
A silicon purification method includes a solidification purification step comprising: preparing the base material to be purified, loading the base material into a crucible, irradiating part of the base material, and fully melting the base material; gradually solidifying the base material by gradually weakening an electron beam so that the solidification proceeds until the solidifying portion occupies a first predetermined ratio of the base material; loading the remnant of the base material into the crucible, and fully melting the remnant of the base material by irradiating the entire area of the remnant of the base material with the electron beam; gradually solidifying the molten metal portion by gradually weakening the electron beam so that the solidification proceeds until the solidifying portion occupies a second predetermined ratio of the molten metal portion; and removing an unsolidified molten metal portion.
A silicon purification method comprising a solidification purification step in which metal impurities are removed by irradiating a base material made of metallic silicon with an electron beam, the solidification purification step comprising:
Dependencies are inferred from the claim text.