Method of manufacturing glass substrate for magnetic disk, method of manufacturing magnetic disk, and polishing apparatus of glass substrate for magnetic disk
AssigneeHoya Corporation
InventorMasaaki Ueda
Life of this patent
Estimating the term…
Loading patent…
AssigneeHoya Corporation
InventorMasaaki Ueda
Estimating the term…
A method of manufacturing a glass substrate for a magnetic disk having polishing accuracy on an inner circumferential end face of the substrate, and reduced thermal asperities. An inner circumferential end face of a cylindrical polishing object 12, comprising a plurality of stacked glass substrates 20, is polished. A plurality of polishing cloths disposed around a rotation axis of an inner circumference polishing section having the rotation axis are contacted to the inner circumferential end face 116 of the polishing object at even pressure. Then a polishing liquid is supplied between the inner circumferential end face of the polishing object and the inner circumference polishing section. Finally, the inner circumference polishing section and the polishing object are relatively rotated/moved with the rotation axis as a center, or relatively moved in a direction of the rotation axis, whereby the inner circumferential end face of the polishing object is polished.
A method of manufacturing a glass substrate for a magnetic disk, including an inner circumference polishing step of polishing an inner circumferential end face of a cylindrical polishing object including a plurality of disk-like glass substrates stacked on one another, each of the disk-like glass substrates having an inner hole formed in its center, wherein:
Dependencies are inferred from the claim text.