Eddy current gain compensation
AssigneeApplied Materials, Inc.
InventorsDoyle E. Bennett, Thomas H. Osterheld
Life of this patent
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Abstract
In-situ monitoring during processing of a substrate includes processing a conductive film on a substrate in a semiconductor processing apparatus and generating a signal from an eddy current sensor during processing. The signal includes a first portion generated when the eddy current sensor is adjacent the substrate, a second portion generated when the eddy current sensor is adjacent a metal body and not adjacent the substrate, and a third portion generated when the eddy current sensor is adjacent neither the metal body nor the substrate. The second portion of the signal is compared to the third portion of the signal and a gain is determined based at least on a result of the comparing, and the first portion of the signal is multiplied by the gain to generate an adjusted signal.
Claims17
A method of in-situ monitoring during processing of a substrate, comprising:
- processing a conductive film on a substrate in a substrate processing apparatus;
- generating a signal from an eddy current sensor during processing, the signal including a first portion generated when the eddy current sensor is adjacent the substrate, a second portion generated when the eddy current sensor is adjacent a metal body and not adjacent the substrate, and a third portion generated when the eddy current sensor is adjacent neither the metal body nor the substrate;
- comparing the second portion of the signal to the third portion of the signal and determining a gain based at least on a result of the comparing;
- and
- multiplying the first portion of the signal by the gain to generate an adjusted signal.
A computer program product, tangibly encoded on a computer readable media, operable to cause a data processing apparatus to perform operations comprising:
- receiving a signal from an eddy current sensor during processing of a conductive film on a substrate in a substrate processing apparatus, the signal including a first portion generated when the eddy current sensor is adjacent the substrate, a second portion generated when the eddy current sensor is adjacent a metal body and not adjacent the substrate, and a third portion generated when the eddy current sensor is adjacent neither the metal body nor the substrate;
- comparing the second portion of the signal to the third portion of the signal and determine a gain based at least on a result of the comparing;
- and
- multiplying the first portion of the signal by the gain to generate an adjusted signal.
Dependencies are inferred from the claim text.