X-ray analysis apparatus and X-ray analysis method

An X-ray analysis method for irradiating an irradiation point on a sample with radiation from a radiation source, detecting a characteristic X-ray and a scattered X-ray emitted from the sample by an X-ray detector, outputting a signal including energy information about the characteristic X-ray and the scattered X-ray, and analyzing the signal by an analyzer comprising:

• measuring the height of the irradiation point on the sample by a height measuring mechanism;
• and
• positioning the irradiation point by relatively shifting the sample on a sample stage, the radiation source and the X-ray detector with respect to each other by a shifting mechanism, wherein
• the positioning the irradiation point includes controlling the shifting mechanism on the basis of the measured height of the irradiation point on the sample and adjusting the distance of the sample with respect to the radiation source and the X-ray detector by a controller.

An X-ray analysis method for irradiating an irradiation point on a sample with radiation from a radiation source, detecting a characteristic X-ray and a scattered X-ray emitted from the sample by an X-ray detector, outputting a signal including energy information about the characteristic X-ray and the scattered X-ray, and analyzing the signal by an analyzer comprising:

• measuring the height of the irradiation point on the sample by a height measuring mechanism;
• and
• conducting measurement and analysis by delivering radiation at the height of the irradiation point on the sample, wherein
• the conducting measurement and analysis includes correcting parameters used in calculation according to the difference between a standard position of irradiation of the radiation and the heightwise position of the irradiation point when performing the calculation for a quantitative analysis from data obtained by the analyzer.