Process liquid supply system, process liquid supply method, and storage medium

A process liquid supply method for supplying to a process vessel a process liquid formed by diluting a chemical liquid with a pure water, the process liquid supply method comprising the steps of:

• supplying a chemical liquid from a chemical liquid tank storing the chemical liquid to a supply pipe connected to a process vessel, by supplying a compressed gas to the chemical liquid tank;
• diluting the chemical liquid supplied from the chemical liquid tank to the supply pipe, by supplying a pure water to the supply pipe;
• and
• gradually or stepwise continuously increasing a pressure of the compressed gas supplied to the chemical liquid tank regardless of the pressure of the chemical liquid tank, after the supply of the chemical liquid from the chemical liquid tank to the supply pipe is started, based on elapsed time in a supply period and/or remaining amount of chemical in the chemical liquid tank to avoid lowering of the processing liquid concentration.

A computer readable storage medium including a program for controlling a process liquid supply system for supplying to a process vessel a process liquid formed by diluting a chemical liquid with a pure water to accomplish a process liquid supply method comprising:

• a step of supplying a chemical liquid from a chemical liquid tank storing the chemical liquid to a supply pipe connected to a process vessel, by supplying a compressed gas to the chemical liquid tank;
• a step of diluting the chemical liquid supplied from the chemical liquid tank to the supply pipe, by supplying a pure water to the supply pipe;
• and
• a step of gradually or stepwise continuously increasing a pressure of the compressed gas supplied to the chemical liquid tank regardless of the pressure of the chemical liquid tank, after the supply of the chemical liquid from the chemical liquid tank to the supply pipe is started, based on elapsed time in a supply period and/or remaining amount of chemical in the chemical liquid tank to avoid lowering of the processing liquid concentration.