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US 8,408,059 B2Granted
Yaw rate sensor and method for operating a yaw rate sensor
AssigneeRobert Bosch GmbH
InventorOdd-Axel Pruetz
Life of this patent
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Abstract
A yaw rate sensor is described which includes a substrate having a main plane of extension and a Coriolis element, the Coriolis element being excitable to a driving oscillation along a first direction parallel to the main plane of extension, using a driving arrangement, and a deflection of the Coriolis element along a second direction perpendicular to the first direction being detectable, and the yaw rate sensor having an interference element for exciting the Coriolis element to an interference oscillation.
Claims14
A yaw rate sensor, comprising:
- a substrate having a main plane of extension;
- a Coriolis element, which is excitable to a driving oscillation along a first direction parallel to the main plane of extension, using a driving arrangement;
- wherein a deflection of the Coriolis element along a second direction, which is perpendicular to the first direction, is detectable, and
- wherein the yaw rate sensor has an interference element for exciting the Coriolis element to an interference oscillation.
1 more element
A method for operating a yaw rate sensor, the method comprising:
- exciting a first Coriolis element to a driving oscillation by a driving arrangement, wherein an interference element is used for exciting the Coriolis element to an interference oscillation at a frequency which is twice a frequency of the driving oscillation;
- wherein the yaw rate sensor includes:
- a substrate having a main plane of extension;
- the Coriolis element, which is excitable to a driving oscillation along a first direction parallel to the main plane of extension, using the driving arrangement, wherein a deflection of the Coriolis element along a second direction, which is perpendicular to the first direction, is detectable;
- and
- the interference element for exciting the Coriolis element to an interference oscillation.
3 more elements
Dependencies are inferred from the claim text.