Profile measurement apparatus

A profile measurement apparatus comprising:

• a probe which includes a gauge head for measuring a profile of an object to be measured and which moves the gauge head within a given range;
• a movement mechanism which moves the probe;
• and
• a controller which measures the profile of the object to be measured by controlling the movement mechanism so as to contact the gauge head against the object to be measured,
• wherein the controller comprises:
• a movement amount acquisition section which acquires a movement amount of the gauge head from a reference position;
• a deviation acquisition section which acquires as a deviation the movement amount when the gauge head is in a non-contact state;
• a determination section which determines whether or not the deviation is greater than a first threshold value;
• and
• a resetting section which, when the determination section determines that the deviation is greater than the first threshold value, resets the reference position to a position arrived at by combining the reference position and the deviation;
• wherein the deviation acquisition section acquires the deviation by moving the probe to a position in which the gauge head is in a non-contact state.