Multiple magneto meters using Lorentz force for integrated systems
AssigneemCube Inc.
InventorsGeorge Hsu, Anthony F. Flannery, Adolf Van Der Heide
Life of this patent
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Abstract
A plurality of integrated electronic compasses and circuit system. The system includes a semiconductor substrate and one or more CMOS integrated circuits formed on one or more portions of the semiconductor substrate. The system has a plurality of electronic compass devices operably coupled to the one or more CMOS integrated circuits. The plurality of electronic compass devices can be integrated with one or more sensors, MEMS, or other devices.
Claims20
An integrated electronic compass and circuit system comprising:
- a semiconductor substrate;
- one or more CMOS integrated circuits formed on one or more portions of the semiconductor substrate;
- and
- a plurality of electronic compass devices operably coupled to the one or more CMOS integrated circuits.
An electronic compass comprising:
- a plurality of electronic compass devices configured in a linear arrangement, each of the electronic compass devices comprising:
- a movable plate;
- a first sensing plate coupled to the movable plate;
- and
- a second sensing plate coupled to the movable plate;
- and
- a hub region coupled to each of the electronic compass devices.
A method of fabricating an integrated electronic compass and circuit device comprising:
- providing a semiconductor substrate comprising a surface region;
- forming one or more CMOS integrated circuits formed on one or more portions of the semiconductor substrate;
- forming a thickness of dielectric material overlying the one or more CMOS integrated circuits;
- joining a substrate overlying the thickness of dielectric material;
- thinning the substrate to a predetermined thickness;
- forming one or more material layers overlying the thinned substrate;
- and
- etching the one or more material layers to form a plurality of electronic compass devices, each of the electronic compass devices having one or more electronic compass elements.
Dependencies are inferred from the claim text.