Magnetically enhanced power inductor with self-aligned hard axis magnetic core produced in an applied magnetic field using a damascene process sequence

A method of fabricating an inductor structure on an integrated circuit structure, the method comprising:

• forming a passivation layer over the integrated circuit structure;
• forming a segmented, bottom magnetic core element over the passivation layer, the bottom magnetic core element having a longitudinal axis;
• forming a conductive inductor coil element over the bottom magnetic core element and separated therefrom by intervening dielectric material;
• and
• forming a segmented, top magnetic core element over the inductor coil element and separated therefrom by intervening dielectric material, the top magnetic core element having a longitudinal axis that is parallel to the longitudinal axis of the bottom magnetic core element;
• and
• wherein the inductor coil element runs orthogonal to the longitudinal axis of the bottom and top magnetic core elements, the easy magnetic axis of the bottom and top magnetic core elements runs parallel to the inductor coil element, and the hard magnetic axis of the bottom and top magnetic core elements runs parallel to the longitudinal axis of the bottom and top magnetic core elements,
• and wherein the bottom and top magnetic core elements are formed in an applied magnetic field that is parallel to the easy axis.