Scrubber brush with sleeve and brush mandrel for use with the scrubber brush
AssigneeApplied Materials, Inc.
InventorsHui Chen, Sheshraj L. Tulshibagwale, Hideshi Takahashi, Toshikazu Tomita, Takashi Fujikawa
Life of this patent
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Abstract
In one aspect, a scrubber brush assembly is provided. The scrubber brush assembly includes (1) a cylindrical brush including exterior and interior surfaces; and (2) a sleeve having an exterior surface coupled to the interior surface of the scrubber brush and an interior surface. The exterior surface of the sleeve includes first coupling features adapted to prevent rotation of the sleeve relative to the brush. The scrubber brush assembly also includes a mandrel coupled to the interior surface of the sleeve. Numerous other aspects are provided.
Claims17
A method for assembling a scrubber brush assembly, comprising:
- providing a scrubber brush formed on a sleeve;
- inserting a mandrel into the sleeve to form the scrubber brush assembly;
- providing aligned openings on the sleeve and mandrel such that a fluid may be jetted through the openings in the mandrel to the scrubber brush;
- and
- extending the scrubber brush through the openings on the sleeve.
A scrubber brush assembly comprising:
- a cylindrical brush including exterior and interior surfaces;
- a sleeve having an exterior surface coupled to the interior surface of the brush and an interior surface, the exterior surface of the sleeve including first coupling features adapted to prevent rotation of the sleeve relative to the brush, the sleeve further including a plurality of openings into which the brush extends;
- and
- a mandrel coupled to the interior surface of the sleeve;
- wherein the mandrel includes a plurality of openings aligned with the plurality of openings of the sleeve so as to enable delivery of fluid from the plurality of openings in the mandrel to the brush.
A sleeve for use in a scrubber brush assembly comprising:
- a cylindrical body having an exterior surface adapted to couple to a scrubber brush and an interior surface adapted to couple to a mandrel;
- first coupling features positioned on the exterior surface adapted to prevent rotation of the sleeve relative to the scrubber brush;
- and a plurality of openings into which the brush extends;
- wherein the plurality of openings are adapted to align with a plurality of openings in a mandrel so as to enable delivery of fluid from the plurality of openings in the mandrel to the brush.
A mandrel for use in a scrubber brush assembly having a scrubber brush formed on a sleeve comprising:
- a cylindrical body having first and second ends and an exterior surface adapted to couple to an interior surface of the sleeve;
- a drive-shaft coupling feature positioned at the first end of the cylindrical body adapted to couple the mandrel to a drive shaft and to provide a space between the drive shaft and the sleeve;
- a plurality of openings adapted to align with a plurality of openings of the sleeve so as to enable delivery of fluid from the plurality of openings in the mandrel to the scrubber brush;
- and
- a plurality of grooves and raised regions positioned on the exterior surface of the cylindrical body.
Dependencies are inferred from the claim text.