Master teaching jig
AssigneeWD Media, LLC
InventorsYi Chun Tan, Huat Seng Khor, Eang Keong Tan, Chun Beng Ang, Chay Hoon Tang
Life of this patent
Estimating the term…
Abstract
A disk carrier for teaching disk positioning in a substrate changing system. The disk carrier composed of a panel having a disk opening configured to receive a disk and a plurality of beam sensors disposed around the disk opening to project beams parallel to a surface of the disk when secured within the disk opening. The plurality of beam sensors may be composed of at least one beam sensor on each of a front side and rear side of the panel.
Claims18
A disk carrier positioning apparatus, comprising:
- a panel having a disk opening configured to receive a disk;
- a plurality of beam sensors disposed around the disk opening to project beams parallel to a surface of the disk when secured within the disk opening, the plurality of beam sensors comprising at least one beam sensor on each of a front side and rear side of the panel;
- and
- a top gripper and a bottom gripper to secure the disk within the disk opening,
- wherein the plurality of beam sensors are configured to detect alignment of the disk within the disk opening when secured by the to and bottom grippers.
A method of teaching disk positioning, comprising:
- inserting a disk into a disk opening of a carrier using a robotic arm;
- and
- determining a misalignment of the inserted disk within the carrier using a plurality of beam sensors disposed around the disk opening, wherein the plurality of beam sensors comprise at least one beam sensor on each side of the disk,
- wherein determining the misalignment comprises determining a slant misalignment of the disk within the disk opening by projecting a plurality of beams parallel to a surface of the disk using the plurality of beam sensors by detecting an interruption of at least one of the plurality of projected beams.
A method of teaching disk positioning, comprising:
- inserting a disk into a disk opening of a carrier using a robotic arm;
- determining a misalignment of the inserted disk within the carrier using a plurality of beam sensors disposed around the disk opening, wherein the plurality of beam sensors comprise at least one beam sensor on each side of the disk,
- inserting the disk into the disk opening of the carrier using the robotic arm;
- and
- detecting at least one of an under insertion and an over insertion of the disk using the plurality of beam sensors.
A disk sputtering apparatus, comprising:
- a disk transportation carrier comprising a panel having a plurality of disk openings, each of the disk openings have corresponding disk grippers to secure disk therein;
- a disk changing system;
- and
- a controller operatively coupled with the disk changing system to insert disks into and extract disks from the grippers within the disk openings of the panel, wherein the panel further comprises:
- a plurality of beam sensors disposed around each of the disk openings to project beams parallel to a surface of the disk when secured within the disk openings, each of the plurality of beam sensors comprising at least one beam sensor on each side of the panel.
Dependencies are inferred from the claim text.